| 摘要 |
PROBLEM TO BE SOLVED: To prevent an excessive potential from being applied to a sample and damaging it, when contact resistance is measured by a four-terminal electric resistance measurement method. SOLUTION: By applying a potential from the ground of V/2 to a terminal Ta, and applying the potential of V/2 also to a terminal Tb, a resistance measuring voltage V is applied between the terminals Ta and Tb. Consequently, the value of voltage from the ground to be applied to the sample 3 is prevented from exceeding V/2, even when the state of the contact resistance is the worst. Next, similarly to terminals Tc and Td, potentials of +V/2 and -V/2 from the ground are applied. COPYRIGHT: (C)2007,JPO&INPIT
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