| 摘要 |
PROBLEM TO BE SOLVED: To enhance two-dimensional space resolving power in a horizontal direction in a light coherence tomographic image measuring method. SOLUTION: The light coherence tomographic image measuring apparatus has an extremely short pulse laser device 1 a beam splitter 3 for bisecting the light pulse from the extremely short pulse laser device 1 to make one of the bisections serve as irradiation light, and the other one of them as reference light, an irradiation beam profile forming device 6 for forming light pulses of two kinds of beam profiles from the irradiation light, a photodetector 15 for measuring the interference intensity of the reflected from the sample 13 to be measured due to the light pulses of two kinds of the beam profiles successively thrown on the sample 13 to be measured and the reference light at every profile, a computer 16 for calculating the difference value between two kinds of interference intensities obtained by the light pulse of two kinds of the beam profiles and a light delay mechanism 14 for changing the light path length of the reference light by predetermined quantity. COPYRIGHT: (C)2007,JPO&INPIT
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