| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect detection method and a defect detection device capable of detecting a defect of the surface state of an inspection object with extremely high accuracy. SOLUTION: This defect detection method has a step (step 1) for extracting a plurality of surface height data; a step (step 5) for calculating the first reference line; a step (sep 6) for calculating respectively the first peak point which is a point showing the surface height data wherein the first difference calculated relative to each measuring point becomes maximum in each section of the first section and the second section, and calculating the second reference line passing each first peak point; a step (step 7) for calculating respectively the second peak point which is a point showing the surface height data wherein the second difference calculated relative to each measuring point becomes maximum in each section, and calculating the third reference line passing each second peak point; and a step (step 8) for calculating an evaluation value based on the third difference calculated relative to each measuring point. COPYRIGHT: (C)2007,JPO&INPIT
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