| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning device excellent in environmental safety, capable of reducing the amount of a cleaning solvent used and capable of efficiently cleaning by steam and drying a work. SOLUTION: In the cleaning device having a cleaning vessel 12 cleaning the work by using the cleaning solvent and a vapor generating vessel 52 arranged separated from the cleaning vessel 12 and generating vapor of the cleaning solvent, the cleaning vessel 12 is provided at least with a liquid cleaning area 16 installed in the lower part and cleaning the work by the liquid of the cleaning solvent, with a vapor cleaning area 18 installed in the intermediate part and cleaning the work by vapor, and with a vapor cooling area 20 installed in the upper part and liquifying the cleaning solvent by cooling the vapor of the cleaning solvent. A first pipe 54 is installed between the cleaning vessel 12 and the vapor generating vessel 52 for supplying vapor generated in the vapor generating vessel 52 to the vapor cleaning area 18, and the first pipe 54 is installed lower at the installing position 56 of the vapor generating vessel 14 than at the installing position 22 of the vapor cleaning area 18. COPYRIGHT: (C)2007,JPO&INPIT
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