| 发明名称 |
Thermal sensor with increased sensitivity |
| 摘要 |
The invention provides a thermal sensor having a first and second temperature sensing elements each being formed on a thermally isolated table in a first substrate.
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| 申请公布号 |
US2007138394(A1) |
申请公布日期 |
2007.06.21 |
| 申请号 |
US20060584466 |
申请日期 |
2006.10.20 |
| 申请人 |
ANALOG DEVICES, INC. |
发明人 |
LANE WILLIAM A.;LYDEN COLIN G.;HYNES EAMON;COYNE EDWARD J. |
| 分类号 |
G01J5/02 |
主分类号 |
G01J5/02 |
| 代理机构 |
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