发明名称 MOS TRANSISTOR WITH BETTER SHORT CHANNEL EFFECT CONTROL AND CORRESPONDING MANUFACTURING METHOD
摘要 The integrated circuit comprises at least one MOS transistor (T) including a gate (GR) having a bottom part in contact with the gate oxide. Said bottom part has an inhomogeneous work function (WFB, WFA) along the length of the gate between the source and drain regions, the value of the work function being greater at the extremities of the gate than in the centre of the gate. The gate comprises a first material (A) in the centre and a second material (B) in the remaining part. Such configuration is obtained for example by silicidation.
申请公布号 WO2007068393(A1) 申请公布日期 2007.06.21
申请号 WO2006EP11792 申请日期 2006.12.07
申请人 STMICROELECTRONICS (CROLLES 2) SAS;KONINKLIJKE PHILIPS ELECTRONICS N.V.;MULLER, MARKUS;MONDOT, ALEXANDRE;POUYDEBASQUE, ARNAUD 发明人 MULLER, MARKUS;MONDOT, ALEXANDRE;POUYDEBASQUE, ARNAUD
分类号 H01L21/28;H01L21/8238;H01L29/49 主分类号 H01L21/28
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