发明名称 SEMICONDUCTOR DEVICE AND DIE BONDING METHOD THEREFOR
摘要 A semiconductor device includes a semiconductor substrate, a first metal film on a back surface of the semiconductor substrate, a second metal film on the first metal film, and a third metal film on the second metal film. The first metal film forms an alloy with a solder. The second metal film causes isothermal solidification of the solder. The third metal film improves solder wetting properties or inhibits oxidation. Further, in a method for die-bonding a semiconductor device, a specific metal is diffused into a solder, when the solder melts, to transform the solder into a high melting point alloy, thereby causing isothermal solidification of the solder. The specific metal is different from the metal of the solder.
申请公布号 US2007138650(A1) 申请公布日期 2007.06.21
申请号 US20060530970 申请日期 2006.09.12
申请人 MITSUBISHI ELECTRIC CORPORATION 发明人 ITO MASAYASU;MIYAWAKI KATSUMI;FUJINO JUNJI
分类号 H01L23/48 主分类号 H01L23/48
代理机构 代理人
主权项
地址