| 摘要 |
An automatic conveyance system is provided to increase spatial application of a clean room, in which several processes are performed, by installing input/output common ports in a stocker. When a cassette is delivered from first process equipment(111), a controller controls an entering time of the cassette into second process equipment(112) according to a process progress of the second process equipment. A stocker(150) temporarily keeps the cassette delivered from the first process equipment, or directly enters the cassette into the second process equipment, according to the control of the controller. The stocker has a first input/output common port(152a) for receiving the cassette and a second input/output common port(152b) discharging the cassette to the second process equipment.
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