| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide the RF (radio frequency)-MEMS element and its manufacturing method using a piezoelectric effect driven upward at a low voltage. <P>SOLUTION: The piezoelectric type RF-MEMS element 100 includes: an upper substrate 110 provided with an RF output signal line 111; an piezoelectric actuator 130 positioned under the RF output signal line; and a lower substrate 120 provided with a cavity 122 with one end of the piezoelectric actuator fixed and with the other end as separating capable of floating. The piezoelectric actuator is formed in its upper surface with an RF input signal line 135, and there is provided a connection pad 136, coming into contact with the RF output signal line, to electrically connect the RF signal line, when the piezoelectric actuator is driven to the upward. The RF-MEMS element prepares the upper substrate provided with the RF output signal line, and after the lower substrate provided with the piezoelectric actuator having the RF input signal line that copes with the RF output signal line has been manufactured, the upper and lower substrates are mutually assembled and are manufactured. <P>COPYRIGHT: (C)2007,JPO&INPIT |
