| 摘要 |
PROBLEM TO BE SOLVED: To provide an MMI capable of completely removing return of reflected light by a simple structure, and to provide a manufacturing method therefor. SOLUTION: In the MMI which is provided with two or more narrow single mode waveguides A to D at both ends of a multi-mode waveguide M and makes incident light from the input side single mode waveguide A interfere in a multi-mode waveguide M to make the light exit from the output side single mode waveguides C, D, the wall surfaces T1, T2 perpendicular to the optical axis direction in which the single mode waveguides A to D are not prepared at both ends of the multi-mode waveguide M are formed slantingly to the direction of thickness. Thus, the light got on the wall surfaces T1, T2 is reflected to a substrate 1 side. In this case, since an angle of incidence to the substrate 1 is small, almost of the light is radiated into the substrate, and does not return to the single mode waveguide on the incident side. COPYRIGHT: (C)2007,JPO&INPIT |
