| 摘要 |
PROBLEM TO BE SOLVED: To maintain a positioning function and to carry in a FOUP to a shelf and to carry out the FOUP from the shelf by a robot hand even though the positioning means is shocked by the factor of an earthquake or the like to the extent so that its function is damaged, when the container such as the FOUP or the like for housing the substarte such as a wafer or the like freely inserting in and out is mounted to the predetermined position of the shelf in the stocker by a positioning means of a kinematic fitting mechanigm or the like. SOLUTION: When the FOUP 8 is carried out from the shelf 2ax by the robot hand 7b, a linkage between a control lever comprising a first lever 22 and a second lever 23, and a locking lever 24 releases a catching engagement between the lever 24 and the FOUP 8 before the FOUP mounting surface of the robot hand 7b reaches the bottom face of the FOUP 8. When the FOUP 8 is carried in the shelf 2ax by the robot hand 7b, the linkage between the control lever and the lever 24 is released and a latching part 24c is automatically latched. COPYRIGHT: (C)2007,JPO&INPIT |
