| 摘要 |
PROBLEM TO BE SOLVED: To obtain a horizontality retaining device which is the horizontality retaining device using an air spring and is capable of controlling a plurality of air springs by a single sensor mechanism. SOLUTION: The horizontality retaining device is composed so as to be provided with a plurality of air spring units which is located in a distinct plane position between object pallets installing an object and floor surface and allows the object pallets to change inclination with respect to the floor surface in accordance with supply air pressure, a stationary bed which includes hemispherical concave with an open top and is fixed to the floor surface, a turning table which includes hemispherical convex engaging to make it possible to relatively turn in a whole direction with the hemispherical concave and moves along with the object pallets and an inclination sensor mechanism which makes the supply air pressure change relative to the plurality of air spring units in accordance with relatively turning position with respect to the stationary bed of the turning table. COPYRIGHT: (C)2007,JPO&INPIT
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