| 摘要 |
PROBLEM TO BE SOLVED: To provide a multi-joint robot, stably carrying a work such as a semiconductor wafer under simple control without an expensive motor for generating large driving force, and contributing to space-saving for a work place. SOLUTION: This multi-joint robot 1 includes: a hand part 7 holding the work 30; an arm part 6 rotatably holding the hand part 7; a link mechanism 3 rotatably holding the base end side of the arm part 6 and moving so that the moving route of the base end side of the arm part 6 becomes linear in a direction roughly orthogonal to a direction for loading the work 30, and a driving means for moving the arm part 6 so as to linearly interpolate it in a direction for loading the work 30 according to the movement of the link mechanism 3. The length of the base side link part 4 is formed longer than that of the arm part side link part 5, and the base 2 of the link mechanism 3 is disposed with the center position shifted from on the moving route of the base end side of the arm part. COPYRIGHT: (C)2007,JPO&INPIT
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