| 摘要 |
PROBLEM TO BE SOLVED: To reduce the total height of a slider, and to provide a means for facilitating cleaning work. SOLUTION: A dust-proof adapter 11 having a sleeve part 15 where an adapter groove 16 for passing the side plate 9 of a cover plate 7 having a U-shaped section is formed is mounted on the top face 6a of a slider 6 supported on a rail 5 installed on a base 2 to linearly reciprocate, and the upper end face of an outer wall 21 of the dust-proof adapter 11 is formed parallel to the top face 6a of the slider 6 and located above the upper plate 8 of the cover plate 7 to be taken as a stage mounting surface 20 for mounting a moving stage 3. COPYRIGHT: (C)2007,JPO&INPIT
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