发明名称 |
METHOD FOR DAMAGE AVOIDANCE IN TRANSFERRING AN ULTRA-THIN LAYER OF CRYSTALLINE MATERIAL WITH HIGH CRYSTALLINE QUALITY |
摘要 |
A method for damage avoidance in transferring a monocrystalline, thin layer from a first substrate onto a second substrate involves epitaxial growth of a sandwich structure with a strained epitaxial layer buried below a monocrystalline thin layer, and lift-off and transfer of the monocrystalline thin layer with the cleaving controlled to happen within the buried strained layer in conjunction with the introduction of hydrogen.
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申请公布号 |
US2007141740(A1) |
申请公布日期 |
2007.06.21 |
申请号 |
US20060554847 |
申请日期 |
2006.10.31 |
申请人 |
THEODORE NIRMAL D;FREEMAN JOHN L JR;TRACY CLARENCE J |
发明人 |
THEODORE NIRMAL D.;FREEMAN JOHN L.JR.;TRACY CLARENCE J. |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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