SEMICONDUCTOR MANUFACTURING APPARATUS, METHOD OF DETERMINING ITS PREMAINTENANCE CYCLE, AND ITS PREMAINTENANCE METHOD

摘要

PROBLEM TO BE SOLVED: To properly establish a premaintenance cycle before feeding a semiconductor manufacturing apparatus into a production line in the semiconductor manufacturing apparatus, and to provide a method of determining a premaintenance cycle and a premaintenance method of the semiconductor manufacturing apparatus. SOLUTION: An apparatus includes: a backside wafer housing section 6 capable of housing a backside wafer 5 separating from a wafer 3 for products, in which a mirror plane polishing of a backside is carried out and a mirror plane degree of a front surface is polished to be higher than that of the backside; and a conveyance mechanism 2 which conveys the housed backside wafer 5 onto a stage 1. COPYRIGHT: (C)2007,JPO&INPIT