COATING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a coating apparatus preventing a foreign substance from dropping on a substrate to be coated. SOLUTION: A guide member is extendedly disposed along the direction crossing the space above a stage; and a slide supporting member supporting a nozzle reciprocates along the guide member. A pair of pulleys are disposed at both end positions of the guide member respectively and tied with a driving belt connected to the slide supporting member. Pulley covers cover a pair of pulleys respectively and each includes a partition panel dividing an inner space into a first vacant chamber in which the pulley is disposed and a second vacant chamber provided at the side to which the guide member is disposed with respect to the first vacant chamber. COPYRIGHT: (C)2007,JPO&INPIT