发明名称 Modular device for coating surfaces
摘要 The invention relates to a vacuum chamber for coating items ( 10 ) in which a physical vapor deposition method (PVD) is carried out. The aim of the invention is to create a vacuum chamber of the aforementioned kind which can be provided with modular cathodes. For this purpose, the vacuum chamber is provided with a plurality of receiving devices in which a plurality of cathodes each can be arranged. A first receiving device ( 30 ) for receiving one or more cathodes ( 40, 42, 44, 46 ) is provided substantially in the center of the vacuum chamber ( 20 ) and two additional receiving devices ( 32, 34 ) for receiving at least one cathode ( 48, 50, 52, 54 ) each are provided on the edges of the vacuum chamber ( 20 ) in a door-like manner.
申请公布号 US2007137566(A1) 申请公布日期 2007.06.21
申请号 US20040575854 申请日期 2004.10.15
申请人 PIVOT A.S. 发明人 CSELLE TIBOR;JILEK MOJMIR
分类号 C23C16/00;C23C14/00;C23C14/34;H01J37/34 主分类号 C23C16/00
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