| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a soft X-ray multilayered film mirror having field intensity resistance and heat resistance, capable of suppressing decline of reflectivity. <P>SOLUTION: This soft X-ray multilayered film mirror is constituted of a multilayered film layer formed by laminating a high refractive index layer 2 comprising a material wherein the difference between a refractive index in an X-ray domain and a refractive index in vacuum is relatively small and a low refractive index layer 3 comprising a material wherein the difference of each refractive index is relatively large, alternately repeatedly from the substrate side. In this case, The mirror has a constitution wherein, in the multilayered film layer, an intermediate layer 4 is inserted only between the high refractive index layer 2 and the low refractive index layer 3 laminated on a surface side part of the multilayered film layer. <P>COPYRIGHT: (C)2007,JPO&INPIT |
