发明名称 METHOD FOR MANUFACTURING MESH BOARD
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a mesh board capable of removing a debris in a short time. <P>SOLUTION: A thin board fixed on a jig for a chemical polishing and made of titanium is dipped in a dipping tank, and a debris is removed adhering on the surface of a mesh. A convection is generated in chemicals in the dipping tank, and chemicals are made to flow into the small holes of the thin board. The thin board is washed by using pure water, compressed air is sprayed and a moisture adhering to the surface, and small holes of the thin board is removed together with the remaining debris or the like. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007157860(A) 申请公布日期 2007.06.21
申请号 JP20050348585 申请日期 2005.12.02
申请人 NIKON CORP 发明人 NAKAMURA JUNJI;DOMOTO TAKAHIRO;OKI TAKAYUKI;OKANO KENTARO
分类号 H01L21/027;G03F7/20 主分类号 H01L21/027
代理机构 代理人
主权项
地址