| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a radiation detection unit, where a plurality of semiconductor detecting elements are arranged accurately, and to provide a radiation inspection apparatus that uses the radiation detection unit. <P>SOLUTION: A plurality of detection substrates 22 are laminated and fixed, having a wiring board 24, a semiconductor detecting element 25 for detecting radiations stuck onto the upper surface of the wiring board 24, and a spacer 28 stuck onto the upper surface of the wiring board 24. Each detection substrate 22 is arranged so that the semiconductor detecting element 25 and the spacer 28 are in a prescribed position relation. Furthermore, the detection substrates 22 are fixed by fixing members 23a, 23b, while respective spacers 28 are aligned mutually on an X-Y plane and are stacked. In the spacer 28, a level difference section 28e is provided so that the lower surface of the wiring board 24 does not come into contact with the spacers 28 that is below the lower surface, and vertical and horizontal directions are positioned while the spacers 28 are in contact each other. <P>COPYRIGHT: (C)2007,JPO&INPIT |
