| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To ensure electric connection between a substrate and a space transformer, and to perform maintenance easily at a low cost. <P>SOLUTION: A probe card includes a plurality of probes for coming into contact with a semiconductor wafer and inputting and outputting an electric signal, a probe head for storing and holding the plurality of probes, a substrate having a wiring pattern corresponding to a circuit structure for generating a signal for inspection, a reinforcing member that is mounted to the substrate and reinforces the substrate, and a housing having a plurality of connection terminals expandable in the axial direction and a plurality of hole sections for storing the plurality of connection terminals individually. The probe card also comprises an interposer that is stacked on the substrate and relays wires of the substrate, and the space transformer that is interposed and stacked between the interposer and the probe head, converts the interval between the wires relayed by the interposer and comes out of the surface on the opposite side to the probe head. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
