| 摘要 |
<P>PROBLEM TO BE SOLVED: To fully remove carbon on an optical element, and also to prevent or suppress excessive removal of the carbon leading to oxidation on the surface of the optical element. <P>SOLUTION: An aligner for radiating a flux from a light source to a reticle through the optical element 2 for exposing a pattern of the reticle on a target of the exposure is equipped with means 13 and 4 for removing an organic substance attaching onto the optical element, means 5 and 12 for detecting that the organic substance is removed from a rate of change of a quantity of electrons emitted from the element, and means 9 and 11 for controlling the operation of the removing means based on a signal from the detecting means. <P>COPYRIGHT: (C)2007,JPO&INPIT |
