| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for evaluating a piezoelectric film capable of acquiring displacement of the piezoelectric film having a small measurement error. SOLUTION: The device 11 for evaluating the piezoelectric film 31 has a probe 13 provided over a sample fixing tool 20 to be brought into contact with a measuring surface of the piezoelectric film 31, a light source 16 for irradiating the probe 13 with laser light 34, a position detection element 17 for receiving reflected light laser 35 displaced by deflection of the probe 13, a position detection signal processing circuit 18 for calculating displacement from a deviation amount of the reflected light laser 35 received by the position detection element 17, and the sample fixing tool 20 for fixing the piezoelectric film 31. The piezoelectric film 31 is fixed by the sample fixing tool 20, to form the upper surface where the measuring surface in the crossing direction to the electric field direction can be brought into direct contact with the probe 13 (explorer 33). COPYRIGHT: (C)2007,JPO&INPIT
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