| 摘要 |
PROBLEM TO BE SOLVED: To provide a nozzle plate which has a flat delivering face that enables correct and stable delivering of a liquid from minute nozzles by a low application voltage by using a liquid droplet delivering technique of an electrostatic sucking system, and to provide a manufacturing method for a nozzle plate, and a liquid delivering head using the nozzle plate. SOLUTION: In the nozzle plate which includes the nozzles where the liquid is delivered from delivering holes as liquid droplets, and which is used for the liquid delivering head, a first face formed of a glass whose volume resistivity is not smaller than 10<SP>15</SP>Ω×m and where the delivering holes of the nozzles are formed is flat. The nozzle plate has small diameter parts and large diameter parts. The small diameter part has the delivering hole made one opening. The large diameter part communicates with the other opening of the small diameter part and has an opening in a second face opposite to the first face. COPYRIGHT: (C)2007,JPO&INPIT
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