发明名称 Damascene Phase Change RAM and Manufacturing Method
摘要 A method for manufacturing a memory device uses a damascene process to define memory elements. The device comprises a first electrode having a top side, a second electrode having a top side and an insulating member between the first electrode and the second electrode. The insulating member has a thickness between the first and second electrodes near the top side of the first electrode and the top side of the second electrode. A damascene patch crosses the insulating member aligned with the first and second electrodes, and defines an inter-electrode path between the first and second electrodes across the insulating member. An array of such memory cells is provided.
申请公布号 US2007138458(A1) 申请公布日期 2007.06.21
申请号 US20070677354 申请日期 2007.02.21
申请人 MACRONIX INTERNATIONAL CO., LTD. 发明人 LUNG HSIANG LAN
分类号 H01L47/00 主分类号 H01L47/00
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