| 摘要 |
A method of forming a gate of a semiconductor device, including the steps of sequentially forming a tunnel oxide film, a nitride film, a dielectric layer, a polysilicon layer, a metal silicide film, and a hard mask film on a semiconductor substrate; sequentially etching the hard mask film, the metal silicide film, the polysilicon layer, and a predetermined region of the dielectric layer, forming a control gate pattern and also exposing the nitride film; performing a thermal oxidization process on both sides of the control gate pattern, forming an oxide film; and stripping the exposed nitride film by a wet etch process, thereby exposing the tunnel oxide film.
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