METHOD OF MANUFACTURING SEMICONDUCTOR FILM, AND LASER TREATMENT METHOD AND APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor film for irradiating the semiconductor film with laser beams. SOLUTION: An oscillator oscillates laser beams which pass through a cylindrical concave lens and a first cylindrical convex one, thus extending the laser beams in a first direction of the section of the laser beams. The laser beams pass through a first fly eye lens, thus uniformizing the distribution of energy density in a first direction. The laser beams pass through a second fly eye lens, thus uniformizing the distribution of the energy density in a second direction orthogonally crossing the first one. The laser beams are extended in the second direction which pass through the second cylindrical convex lens, thus allowing the laser beams to converge in the first direction, and applying the laser beams through the second cylindrical convex lens to the semiconductor film. COPYRIGHT: (C)2007,JPO&INPIT