发明名称 Semiconductor Device and Testing Method Thereof, and Resistance Measurement Apparatus
摘要 According to the present invention, there is provided a semiconductor device having: a switching element serially connected to a resistive element to be measured; a plurality of transistors respectively connected in parallel to a series circuit consisting of the resistive element to be measured and the switching element, which will respectively take desired resistance values when turned on; and a measurement section which measures a resistance value of a parasitic resistance which occurs so as to be coupled to the resistive element to be measured by turning off the switching element and then controlling switching operations of the plurality of transistors to change the resistance values of resistors formed by the plurality of transistors, and subsequently measures a resistance value of the resistive element to be measured based on a resistance value of the parasitic resistance by turning on the switching element while turning off the plurality of transistors.
申请公布号 US2007139034(A1) 申请公布日期 2007.06.21
申请号 US20060608298 申请日期 2006.12.08
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 TAKADA SHUICHI;TANAKA EISUKE;ABIRU TAKESHI
分类号 G01R31/28 主分类号 G01R31/28
代理机构 代理人
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