LIQUID DROP DELIVERY APPARATUS, MANUFACTURING METHOD FOR ELECTRO-OPTICAL APPARATUS, ELECTRO-OPTICAL APPARATUS AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a liquid drop delivery apparatus capable of preventing drawing failure by dust by removing the dust on a work.

SOLUTION: The liquid drop delivery apparatus is provided with a drawing means 3 for performing drawing by delivering a function liquid drop on the work W while relatively moving the function liquid drop delivery head 17 introducing the function liquid relative to the work W; an air suction port 5 facing to the work W relatively moved toward the function liquid drop delivery head 17 and sucking the dust on the work W; and an air suction means 31 continued to the air suction port 5.

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