| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow control system capable of automatically adjusting flow rate. SOLUTION: This system comprises a branch conduit for supplying cooling water to each semiconductor manufacturing device 51-53; a branch pipe flow control valve; a semiconductor manufacturing device operation part for inputting a setting condition of flow rate of cooling water; a branch pipe flow sensor; a semiconductor manufacturing device instruction processing part including a flow control comparator outputting a signal related to control of the branch pipe flow control valve; an automatic input means 50 automatically inputting a setting condition that is the total sum of supply quantity of cooling water to each semiconductor device; an operation part 32 receiving the setting condition input by the automatic input means 50; a flow control valve 34 provided in a common conduit 16; a flow sensor 26 for detecting the flow rate of cooling water within the common conduit 16; and an instruction processing part 40 including a flow control comparator 36 for comparing a set signal inputted from the operation part 32 with a detection signal by the flow sensor 26 and outputting a signal related to control of the flow control valve 34. COPYRIGHT: (C)2007,JPO&INPIT
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