| 摘要 |
PROBLEM TO BE SOLVED: To reduce surface roughness occurring on a grinding portion, and thereby to reduce damage caused by machining and to improve grinding efficiency. SOLUTION: Abrasive grains are pushed and fixed on the surface of the grinding surface plate with mechanical pressure, and then the surface of the grinding surface plate containing the abrasive grains is subjected to plasma treatment, thereby improving the adhesiveness between the abrasive grains and the surface plate, and reducing the number of rolling particles separating from the surface of the surface plate, so as to realize flat abrasive machining of the device surface consisting of a plurality of materials. COPYRIGHT: (C)2007,JPO&INPIT
|
