摘要 |
According to the invention, a shape with rotational symmetry and minuteness can be easily processed. There is provided a laser ablation apparatus that irradiates laser beams on a work-piece to process the work-piece. The laser ablation apparatus includes a work-piece supporting part that supports the work-piece, an irradiating part that is arranged opposite the work-piece supporting part and irradiates the laser beams of which at least a part are transmitted through a mask on the work-piece, and a rotary driving part that drives the work-piece supporting part and the irradiating part in order to relatively move these parts in a direction of rotation.
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