发明名称 Laser ablation apparatus, processing method, and mask therefor
摘要 According to the invention, a shape with rotational symmetry and minuteness can be easily processed. There is provided a laser ablation apparatus that irradiates laser beams on a work-piece to process the work-piece. The laser ablation apparatus includes a work-piece supporting part that supports the work-piece, an irradiating part that is arranged opposite the work-piece supporting part and irradiates the laser beams of which at least a part are transmitted through a mask on the work-piece, and a rotary driving part that drives the work-piece supporting part and the irradiating part in order to relatively move these parts in a direction of rotation.
申请公布号 US2007138152(A1) 申请公布日期 2007.06.21
申请号 US20060642090 申请日期 2006.12.20
申请人 ARISAWA MFG. CO., LTD. 发明人 YAKUSHIJI KENICHI;MANDOKORO TOSHIO
分类号 B23K26/38 主分类号 B23K26/38
代理机构 代理人
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