FRICTION REDUCTION STRUCTURE IN VACUUM

摘要

PROBLEM TO BE SOLVED: To provide a new low frictional material having a low frictional coefficient in a vacuum, and realizing the improvement of the durability and the increase in the efficiency of sliding in the sliding part of various apparatus in a vacuum. SOLUTION: Regarding the friction reduction structure in a vacuum in a sliding part composed of a substrate and a sliding body slidably moving on the substrate, a piezo material film is formed on the sliding face of the substrate. COPYRIGHT: (C)2007,JPO&INPIT