| 摘要 |
PROBLEM TO BE SOLVED: To realize high resolving power inspection at a high S/N ratio by effectively reducing the noise due to usual propagation light during high resolving power inspection due to discharged near field light in optical inspection performing the inspection due to the usual propagation light and the inspection due to the discharged near field light so as to change over them. SOLUTION: The optical fiber probe, which has a usual propagation light emitting surface the emitting side end surface of an optical fiber of a single mode having a core for propagating a laser beam in a concentric surface state so as to set a near field light discharging surface on an axial side and keeps a coating layer for propagating surface plasmon overlaying the near field light discharging surface while the usual propagation light emitting surface overlaying so that the emitted usual propagation light is condensed to a position separated from the discharged near field light on an axis, has a phase-shift means, which gives a predetermined phase difference to an incident laser beam of a specific polarizing component to change a polarizing state, in the region of at least a part of the usual propagation emitting surface. COPYRIGHT: (C)2007,JPO&INPIT
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