| 摘要 |
PROBLEM TO BE SOLVED: To realize highly accurate thickness measurement even when the container center is displaced by runout rotation or the like. SOLUTION: This thickness measuring device is equipped with a half mirror 12 for distributing scattered light scattered from the outer wall surface M and the inner wall surface N of the container 3 into the first optical path and the second optical path which is different from the first optical path, a lens 13 for condensing the scattered light through the first optical path from the half mirror 12, a CCD<SB>A</SB>for reading the scattered light condensed by the lens 13 as a scattered spot on the outer wall surface M and the inner wall surface N, a CCD<SB>B</SB>for reading the scattered light through the second optical path from the half mirror 12 as a regular reflection spot, and a data processing part 2 for calculating displacement of the center position of the container 3 and the thickness to the displaced center position based on position information of the scattered spot read by the CCD<SB>A</SB>and the regular reflection spot read by the CCD<SB>B</SB>. Consequently, the device can detect accurately the displaced center position and realize highly accurate thickness measurement even when the container center is displaced by runout rotation or the like. COPYRIGHT: (C)2007,JPO&INPIT
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