| 摘要 |
Nanoscale acceleration and vibration sensors comprise a thin beam attached to a first substrate, being generally suspended over the first substrate by a cantilevered attachment. The thin beam functions as a second substrate for a coating that has a resistivity that varies with strain in the beam. The coating comprises an ordered array of conductive nanoparticles coupled to the substrate either by a thin polymeric layer or a columnar spacer that is a molecular species. The polymer or columnar spacers preferably have a thickness that is at least two times the diameter of the conductive nanoparticles. A circuit to measure the resistance of the coating is formed on or with the beam substrate. The sensor may deploy an array of beam having different dimensions to represent a range of resonant frequencies that can be simultaneously detected and resolved. The sensor may deploy multiple beams of the same dimensions to provide redundancy in the case of partial device failure.
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