发明名称 Semiconductor device and method for fabricating the same
摘要 The present invention relates to a semiconductor device with an improved contact margin between an interconnection line and a bit line and a method for fabricating the same. The semiconductor device includes: a bit line structure formed on a substrate and having a number of bit lines and a pad; a first inter-layer insulation layer formed on the bit line structure and the substrate and having a first opening exposing the pad; a conductive layer formed on the first inter-layer insulation layer and patterned to be a middle pad filled into the first opening and a plate electrode of a capacitor; a second inter-layer insulation layer formed on the first inter-layer insulation layer and the patterned conductive layer and having a second opening exposing the middle pad; and a metal layer filled into the second opening to form an interconnection line contacted to the pad.
申请公布号 US2007138641(A1) 申请公布日期 2007.06.21
申请号 US20070705511 申请日期 2007.02.13
申请人 HYNIX SEMICONDUCTOR INC. 发明人 PYI SEUNG-HO
分类号 H01L23/52;H01L23/48;H01L29/40 主分类号 H01L23/52
代理机构 代理人
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