| 摘要 |
A thermal flow rate sensor includes: a bridge circuit having a heat-generating resistor generating heat by receiving a supplied current, a heating element temperature detector having a resistance value varying in accordance with a temperature of the heat-generating resistor and a fluid temperature detector having a resistance value varying in accordance with a temperature of a fluid; a comparison portion supplying a digital output indicating a difference between voltages at intermediate points in the bridge circuit; a DA converter converting an output from the comparison portion to an analog signal and supplying the resultant signal to the heat-generating resistor as the current; and an output operation portion accumulating outputs from the comparison portion for a prescribed period to output a result of accumulation as a flow rate for the prescribed period, of the fluid which is an object of measurement.
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