发明名称 |
Optical components and production therof |
摘要 |
The invention relates to a method for making an actuation system for an optical component comprising: etching of a first face of a component, to form pads on it, etching of a second face of the component, to expose a membrane made of the same material as the pads, production of the actuation means of the pads and the membrane.
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申请公布号 |
US2007137989(A1) |
申请公布日期 |
2007.06.21 |
申请号 |
US20040583719 |
申请日期 |
2004.12.23 |
申请人 |
DIVOUX CLAIRE;VAUDAINE MARIE-HELENE;ENOT THIERRY |
发明人 |
DIVOUX CLAIRE;VAUDAINE MARIE-HELENE;ENOT THIERRY |
分类号 |
H01H13/72;B81B3/00;B81C1/00;G02B26/08 |
主分类号 |
H01H13/72 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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