发明名称 Optical components and production therof
摘要 The invention relates to a method for making an actuation system for an optical component comprising: etching of a first face of a component, to form pads on it, etching of a second face of the component, to expose a membrane made of the same material as the pads, production of the actuation means of the pads and the membrane.
申请公布号 US2007137989(A1) 申请公布日期 2007.06.21
申请号 US20040583719 申请日期 2004.12.23
申请人 DIVOUX CLAIRE;VAUDAINE MARIE-HELENE;ENOT THIERRY 发明人 DIVOUX CLAIRE;VAUDAINE MARIE-HELENE;ENOT THIERRY
分类号 H01H13/72;B81B3/00;B81C1/00;G02B26/08 主分类号 H01H13/72
代理机构 代理人
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