Patterning methods and products

摘要

The present invention provides a process for producing a surface-modified layer system comprising a substrate ( 2 ) and a self-assembled monolayer (SAM) ( 1 ) anchored to its surface. The SAM ( 1 ) is comprised by aryl or rigid alicyclic moiety species. The process comprises providing a polymorphic SAM ( 1 ) anchored to the substrate ( 2 ), and thermally treating ( 4 ) the SAM to change from a first to a second structural form thereof. The invention also provides a thermolithographic form of process in which the thermal treatment ( 4 ) is used to transfer a pattern ( 3 ) to the SAM ( 1 ), which is then developed.