IMAGE SENSOR INCLUDING MICROLENS HAVING OPTIMAL FOCUS LENGTH, AND METHOD OF MANUFACTURING THE IMAGE SENSOR

摘要

An image sensor and its manufacturing method are provided to improve a photo efficiency of a photodiode by aligning the focus of light transmitted through an RGB channel on a surface of the photodiode using a microlens with an optimum focus length. An image sensor includes a semiconductor substrate, a color filter layer, and microlenses. The substrate(1) includes a blue light detecting photodiode(BPD), a green light detecting photodiode(GPD) and a red light detecting photodiode(RPD). The color filter layer(12) includes color filters capable of filtering blue light, green light and red light. The microlenses(16 to 18) are arranged corresponding to the blue, green and red light detecting photodiodes. The microlenses have different focus lengths from each other. The focus of each microlens is aligned on the blue, green and red light detecting photodiodes.