| 摘要 |
PROBLEM TO BE SOLVED: To provide a TFT board and a manufacturing method for the TFT board which can significantly cut down manufacturing costs and improve the manufacturing yield, by reducing the number of processes in manufacturing processes. SOLUTION: The TFT board includes a glass board 10, a gate electrode 23 and gate wiring 24, a gate-insulating film 30, an n-type oxide semiconductor layer 40, and an oxide conductor layer 60. The TFT board further includes a channel etching stopper 53 which protects a channel 41; and source wiring 65, drain wiring 66, a source electrode 63, a drain electrode 64, and a pixel electrode 67 having the oxide conductor layer 60. COPYRIGHT: (C)2007,JPO&INPIT |
