发明名称 METHOD AND APPARATUS FOR EXAMINING SAMPLE
摘要 PROBLEM TO BE SOLVED: To provide a method for examining samples, capable of attaining optimum imaging. SOLUTION: The method for examining the sample by using a microscope comprises steps of generating spatially coherent light in at least one continuous or continuously tunable wavelength range for illumination of the sample; selecting one or more wavelengths or wavelength ranges of the illumination light according to the sample and/or a prespecified method of examination; illuminating the sample with the illumination light with the selected wavelengths or wavelength ranges; separating the illumination light and the emission light, coming from the sample, into different light paths; removing the illumination light, radiated back by the sample before detection in a detection light path; and detecting the emitted light. In such a manner, selection of the wavelengths or the wavelength ranges of the illumination light is tuned by means of the suppression of the illumination light, and separation of the detection light and the illumination light, such that a prespecified control variable (R) assumes a maximum. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007155722(A) 申请公布日期 2007.06.21
申请号 JP20060322869 申请日期 2006.11.30
申请人 CARL ZEISS MICROIMAGING GMBH 发明人 WILHELM STEFAN;KEMPE MICHAEL;SIMBUERGER EVA
分类号 G01N21/64;G02B21/06;G02B21/18 主分类号 G01N21/64
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