| 摘要 |
PROBLEM TO BE SOLVED: To provide a thickness measuring method and a thickness measuring apparatus of a laminated thin film for accurately, instantaneously and noncontactly measuring a small thickness of the laminated thin film such as a functional resin film and an information electronic material. SOLUTION: In the thickness measuring method of the laminated thin film, a sample (7) having the laminated thin film is irradiated with a white light, a reflection light or a transmission light obtained from the sample (7) is spectrally separated, only an interference signal is selected by implementing a wavelet process after the obtained spectrum is converted into a frequency signal, and the thickness of the thin film is detected by implementing a frequency analyzing process after the interference signal is decimated. The thickness measuring apparatus comprises a light source (1), an irradiating optical fiber (2), a light receiving optical fiber (3), a spectroscope (4), a multichannel detector (5) and a calculating/processing means (6) for implementing the above-described processes. COPYRIGHT: (C)2007,JPO&INPIT
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