| 摘要 |
PROBLEM TO BE SOLVED: To provide a dovetail groove sealing material to be suitably used particularly for a semiconductor manufacturing device or a liquid crystal manufacturing device, having good performance of mounting itself in a dovetail groove, high fall-off resistance, and sufficient sealing force with low load even when used for a larger vacuum gate valve. SOLUTION: The closed circular sealing material 20 to be mounted in the dovetail groove 42 formed in a seal surface comprises a sealing material body 20a to be mounted in the dovetail groove 42, the sealing material body 20a having an approximately triangular molding cross section shape consisting of a first corner portion 24 as one peak formed at a position opposed to the bottom face of the dovetail groove 42, and remaining second and third corner portions 26, 28. At least part of each of the second corner portion 26 and the third corner portion 28 abuts on the side face of the dovetail groove, and a recessed portion 34 is formed in the bottom face of a base end 32 between the second corner portion 26 and the third corner portion 28. COPYRIGHT: (C)2007,JPO&INPIT
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