发明名称 CLEANING MECHANISM OF ROTARY ROLL, AND CLEANING METHOD OF ROTARY ROLL
摘要 PROBLEM TO BE SOLVED: To reduce the consumption amount of a cleaning liquid for cleaning a rotary roll. SOLUTION: The under surface side of the rotary roll 90 is provided with a cleaning liquid storage container 120 covering the under surface of the rotary roll 90 along the shape thereof, and a specified gap D is formed between the cleaning liquid storage container 120 and the rotary roll 90. A cleaning liquid supply port 130 is formed in the cleaning liquid storage container 120. The cleaning liquid storage container 120 is freely movable in a circumferential direction along the surface of the cleaning liquid storage container 120 by a moving mechanism. When cleaning the rotary roll 90, the cleaning liquid storage container 120 is arranged on the under surface side of the rotary roll 90 to store the cleaning liquid in the cleaning liquid storage container 120. The rotary roll 90 is cleaned by rotating the rotary roll 90 and bringing the cleaning liquid of the cleaning liquid storage container 120 and the surface of the rotary roll 90 into contact with each other. After the cleaning, the cleaning liquid storage container 120 is rotated and inclined along the surface of the rotary roll 90 to drop and remove the cleaning liquid from the cleaning liquid storage container 120. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007152253(A) 申请公布日期 2007.06.21
申请号 JP20050352550 申请日期 2005.12.06
申请人 TOKYO ELECTRON LTD 发明人 KAWAGUCHI YOSHIHIRO;SAKAI MASATAKA
分类号 B05C11/10;B05C5/02;B05D3/10 主分类号 B05C11/10
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