| 发明名称 |
APPARATUS FOR BOMBARDING A TARGET WITH IONS |
| 摘要 |
An electromagnetic separator adapted for ion implantation on an industrial production scale has its beam current stabilized and a mechanism within the target chamber for automatically moving targets through the ion beam according to a predetermined scanning pattern.
|
| 申请公布号 |
US3689766(A) |
申请公布日期 |
1972.09.05 |
| 申请号 |
USD3689766 |
申请日期 |
1970.08.21 |
| 申请人 |
ATOMIC ENERGY AUTHORITY UK |
发明人 |
JAMES HARRY FREEMAN |
| 分类号 |
H01J37/317;B01D59/48;B23K15/00;G21K5/08;H01J49/02;(IPC1-7):H01J37/00;G01N23/00 |
主分类号 |
H01J37/317 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
