Hard carbon film, production method thereof, and sliding member

摘要

A hard carbon film formed on a substrate via an intermediate layer is made up of a diamond-like carbon layer and a graphite particle deposition layer formed on the diamond-like carbon layer. The I_D/I_G of the graphite particle deposition layer that is a ratio of the integrated intensity I_D of a peak representing the D band and the integrated intensity I_G of a peak representing the G band that are obtained through the peak separation of the Raman spectrum based on the Raman spectroscopic analysis is 1 or less.