EINRICHTUNG UND VERFAHREN ZUR GEGENSEITIGEN AUSRICHTUNG OPTISCHER ELEMENTE

摘要

An optical axis alignment apparatus 10 has a chuck 13 for holding an optical member 14, a chuck 16 for holding an optical member 15, a pushing mechanism, which pushes the chuck 1 to generate a predetermined frictional force between the optical member 14 and the optical member 15, and actuators 18A to 18D. The actuators 18A to 18D have a piezoelectric element 51b which generates an impulsive inertial force by abrupt extension and contraction.